Platform Characteristics

Deposition-to-characterization path.

01

Multi-element PVD

Co-sputter up to 7 elements onto a 100 mm wafer using DC, RF, pulsed DC, HiPIMS, or reactive sputtering.

02

Physical sample library

Create a real composition-spread thin-film library with 342 registered measurement positions.

03

Composition map

Map element ratios by EDX/EDS or WDX for the material system.

04

Structure and properties

Measure XRD phase data and selected electrical, mechanical, optical, magnetic, or electrochemical response.

05

Scoped follow-up

Scanning droplet cell (SDC), SECCM, XPS, microscopy, or interface analysis can be added when surface change or a localized measurement decides the next step.

06

Next experiment

Measured maps, Bayesian optimization, or Gaussian-process selection support repeat samples or a narrower campaign.

Material decision

Where this applies.

Relevant areas

Relevant systems include magnetic multilayers, coercivity screens, reduced-rare-earth directions, and ferromagnetic shape-memory directions where thin-film screening fits the project.

Experimental plan

Prepare graded magnetic films, measure phase and composition, screen magnetic response, and select regions for tests in a specific layer stack.

Examples

  • Magnetic multilayers
  • Coercivity screens
  • Reduced-rare-earth directions
  • Ferromagnetic shape-memory directions

Methods used

  • graded target or co-sputter design
  • MOKE mapping
  • XRD mapping
  • composition mapping
  • post-treatment comparison

Measurements

  • magnetic response
  • coercivity
  • composition
  • phase
  • texture
  • annealing response

Outputs

  • magnetic response maps
  • composition ranges
  • annealing conditions
  • layer-stack test samples
What comes back: Measured magnetic film ranges for tests in the target layer stack.

Figures

Magnetic-screening method figures.

High-throughput characterization methods for thin-film material libraries.

Library-scale characterization

Composition, structure, magnetic, electrical, optical, mechanical, and microstructure measurements feed measured maps.Ludwig, npj Comput. Mater. 2019, Fig. 2
XRD dataset visualization and latent-space grouping.

XRD dataset visualization

Library-scale diffraction data are grouped to compare phase behavior across measured thin-film samples.Banko et al., npj Comput. Mater. 2021, Fig. 2

Closest Evidence

Relevant method demonstrations.

Banko et al., Commun. Mater. 2020

Process-microstructure maps

Processing-library work documents links between deposition parameters and microstructure.Open source

Banko et al., npj Comput. Mater. 2021

XRD analysis at library scale

Automated XRD analysis supports phase classification across large thin-film datasets.Open source

Platform Basis

Methods behind the screen.

Ludwig, npj Comput. Mater. 2019

Combinatorial thin-film synthesis, high-throughput characterization, data handling, and composition-property mapping.Open source

Banko and Ludwig, ACS Comb. Sci. 2020

Experimental materials data management for linked samples, metadata, and analysis workflows.Open source

References

Cited sources.