Platform Characteristics

Deposition-to-characterization path.

01

Multi-element PVD

Co-sputter up to 7 elements onto a 100 mm wafer using DC, RF, pulsed DC, HiPIMS, or reactive sputtering.

02

Physical sample library

Create a real composition-spread thin-film library with 342 registered measurement positions.

03

Composition map

Map element ratios by EDX/EDS or WDX for the material system.

04

Structure and properties

Measure XRD phase data and selected electrical, mechanical, optical, magnetic, or electrochemical response.

05

Scoped follow-up

Scanning droplet cell (SDC), SECCM, XPS, microscopy, or interface analysis can be added when surface change or a localized measurement decides the next step.

06

Next experiment

Measured maps, Bayesian optimization, or Gaussian-process selection support repeat samples or a narrower campaign.

Material decision

Where this applies.

Relevant areas

Relevant questions include transparent, reflective, absorptive, photonic, photoresponse, and photoelectrochemical thin-film systems.

Experimental plan

Map optical response across thin-film libraries, align spectra with composition and phase, then select samples for coating, layer-stack, or photoresponse tests.

Examples

  • Transparent films
  • Reflectance-tuned films
  • Absorption-tuned films
  • Photoelectrochemical films

Methods used

  • UV-VIS spectroscopy
  • four-point probe
  • XRD mapping
  • composition mapping
  • composition-property visualization

Measurements

  • reflectance
  • absorption
  • band gap
  • transparency
  • conductivity
  • phase
  • thickness

Outputs

  • optical-property maps
  • optical-electrical tradeoff regions
  • selected films
  • samples for layer stack tests
What comes back: Measured optical film samples for coating layer stack, photonic-device, or photoelectrochemical tests.

Figures

Optical and oxide-film figures.

High-throughput characterization methods for thin-film material libraries.

Library-scale characterization

Composition, structure, magnetic, electrical, optical, mechanical, and microstructure measurements feed measured maps.Ludwig, npj Comput. Mater. 2019, Fig. 2
XRD dataset visualization and latent-space grouping.

XRD dataset visualization

Library-scale diffraction data are grouped to compare phase behavior across measured thin-film samples.Banko et al., npj Comput. Mater. 2021, Fig. 2

Closest Evidence

Closest optical and oxide-film demonstrations.

Piotrowiak et al., Adv. Eng. Mater. 2023

Perovskite oxide property ranges

Thin-film libraries were used to tailor optical band gap and electrical conductivity.Open source

Piotrowiak et al., ACS Comb. Sci. 2020

Fe-Co-O optical mapping

Composition spreads connected phase, surface morphology, optical response, and electrode-layer stack behavior.Open source

Platform Basis

Methods behind the screen.

Ludwig, npj Comput. Mater. 2019

Combinatorial thin-film synthesis, high-throughput characterization, data handling, and composition-property mapping.Open source

Banko et al., npj Comput. Mater. 2021

Deep-learning visualization and novelty detection for large XRD datasets from thin-film measurements.Open source

References

Cited sources.