Characterization means measuring the material. The decision is which measurement can resolve the next step. A campaign usually needs a core set of measurements. Some projects need deeper tools when surface chemistry, local electrochemistry, interfaces, depth profiles, or behavior near a device layer controls the result.
EDX/EDS
Composition methods. They help answer: which elements are present, and in what ratio, at each measured position?
XRD
X-ray diffraction. It helps answer: which phases or crystal structures appear across the library?
Four-point probe
Electrical measurement. It helps answer: where is the film conductive, resistive, or changing with composition?
Nanoindentation
Mechanical measurement. It helps answer: where do hardness and elastic modulus change?
UV-VIS reflectance
Optical measurement. It helps answer: where do reflectance, absorption, transparency, or related optical responses change?
MOKE
Magnetic measurement. It helps answer: where does magnetic response change across a thin-film library?
Scanning droplet cell (SDC)
Localized electrochemistry. It helps answer: where do activity, stability, corrosion response, or surface changes appear on defined library positions?
SECCM
Higher-resolution local electrochemistry. Use it when small local differences decide the material question.
XPS, RBS, NRA, atom probe
Surface and depth-sensitive chemistry. Use these tools when surface oxides, buried chemistry, intermixing, or through-depth composition controls the result.
SEM, TEM, AFM, FIB, tomography
Structure, morphology, cross-section, and interface tools. They help explain what the film looks like at smaller length scales.