Application
Semiconductor, RF, photonics, and MEMS films.
Map film ratios and process windows before process transfer work, resonator builds, device stack tests, or custom target decisions.
Physical screen
Advanced-film projects connect wafer-level measurements to stack-relevant samples.
Semiconductor film library
Composition and process windows are screened on the wafer before stack or device work.
Thin-film sample blanks
Selected film windows can move into plain chip, wafer, or layer-stack sample formats when the validation route needs them.Decision problem
Nominal composition is rarely enough for advanced thin films.
Semiconductor, RF, photonic, and MEMS film decisions often depend on phase, texture, stress, resistivity, preferred orientation, seed layers, electrode layers, and stack compatibility. xemX can run screening across composition windows or process windows before teams commit to device stack, resonator, process transfer, or custom target procurement work.
For target-composition questions, multiple sputter sources can be combined in deposition so teams can test film ratios before ordering a custom alloy target.
Customers can bring a film window, seed layer, electrode stack, target composition, or device stack question that needs measured physical evidence before deeper validation.
Screening campaign
Map related film compositions or selected process windows to find film ratios and process windows worth deeper stack, resonator, or device validation.
Prototype coating project
Start from a narrower film, stack, seed layer, electrode-layer, or target composition question and make selected films or scoped test structures when the substrate, mask, stack, and measurement route fit.
What can be measured
Composition, phase, c-axis or preferred orientation, texture, crystallinity, sheet resistance, resistivity, thickness, stress indicators, leakage where supported by the test structure, and stack-relevant behavior.
What comes back
Composition-property maps, candidate film windows, excluded phase fields, selected follow-up films, and technical notes for process transfer or device-test planning.
xemX can support film and selected test-structure work. Final resonator, device, fab, and product qualification usually remain downstream.